Code of Federal Regulations · Section
§ 63.7180 — What Is The Purpose Of This Subpart?
40 C.F.R. § 63.7180
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This subpart establishes national emission standards for hazardous air pollutants (NESHAP) for semiconductor manufacturing facilities. This subpart also establishes requirements to demonstrate initial and continuous compliance with the emission standards.
Authorizing Statute
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Congressional findings and declaration of purpose42 U.S.C. § 7401